양성자가속기/이온빔장치를 이용한 신소재/반도체 분석평가 시스템 현황 및 활용
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이재상 KAERI At Korea Multi-purpose Accelerator Complex (KOMAC), a 100-MeV high power proton linac has been used for proton beam irradiation services for various applications and research programs including material science, bio-medical science, semiconductor applications as well as nuclear physics and basic science since commissioning of the machine in 2013. Currently, one beam line for 20 MeV beam and three beam lines for 100 MeV beam are available for user service. In addition, we have been operating several low-energy ion accelerators including gas ion implanter and metal ion implanter for ion beam irradiation and a 1.7 MV tandem accelerator for ion beam applications such as beam irradiation and ion beam analysis (PIXE, RBS, ERD). We are going to expand the utilization of the facility to secondary beams such as isotope beam (Li-8 for beta-detected NMR) and pulsed neutron. We have also performed extensive R&D efforts using low-energy ion accelerators to characterize metallic, ceramic, polymeric materials. For the future, we have plan to upgrade the proton linac energy from 100 MeV to 200 MeV and construct a new neutron generation target and neutron utilization facility, especially for the atmospheric radiation test for the semiconductor devices in near future. KOMAC facility overview along with on-going activities will be given in this presentation. Acknowledgments This work has been supported through KOMAC (Korea Multi-purpose Accelerator Complex) operation fund of KAERI by MSIT (Ministry of Science and ICT). |